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Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting
(University of Missouri--Columbia, 2013)
with a width, thickness and total length (four serpentine turns) of 15 [mu]m, 5 [mu]m and 1485 [mu]m. Five gold stoppers with height of 2-4 [mu]m were electroplated on the fixed plates to prevent snap-down of the movable plates by overwhelming...